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Please specify IDEA version/OS or attach all the logs to the issue.

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added to issue

once i deleted some big scratch files (used intellij's scratch plugin), the problem was gone

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i also deleted sbt output files (target directory)
afer a recompilation, the problem reappeared. there must be an "evil file"... but the log doesn't tell me which one it is

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I think you need to invalidate caches and restart intellij again : File -> Invalidate Caches / Restart -> Invalidate and Restart.

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