Internal caches are corrupted or have outdated format, forcing project rebuild: java.io.FileNotFoundException

Hello,

I receive this error when I run the project. Rebuild is completed with warnings but without error. This is a J2EE project runs on Wildfly.

I deleted Idea system cache folder, mvn clean install, then Rebuild... Also deleted the target ear folders...

Same error occurs with different file names. Any suggestions? 

Thank you,

Information:Internal caches are corrupted or have outdated format, forcing project rebuild: java.io.FileNotFoundException: //Users/xxx.../xxxxxxxxxxx..Service.class (Not a directory)

Error:Internal error: (java.io.FileNotFoundException) /Users/xxx.../xxxxxxxxxxx....JsonMapper$1.class (Not a directory)
java.io.FileNotFoundException:/Users/xxx.../xxxxxxxxxxx....JsonMapper$1.class (Not a directory)
at java.io.FileOutputStream.open0(Native Method)
at java.io.FileOutputStream.open(FileOutputStream.java:270)
at java.io.FileOutputStream.<init>(FileOutputStream.java:213)
at java.io.FileOutputStream.<init>(FileOutputStream.java:162)
at com.intellij.openapi.util.io.FileUtil.openOutputStream(FileUtil.java:492)
at com.intellij.openapi.util.io.FileUtil.performCopy(FileUtil.java:452)
at com.intellij.openapi.util.io.FileUtil.copyContent(FileUtil.java:447)
at org.jetbrains.jps.incremental.artifacts.instructions.FilterCopyHandler.copyFile(FilterCopyHandler.java:40)
at org.jetbrains.jps.incremental.artifacts.instructions.FileBasedArtifactRootDescriptor.copyFromRoot(FileBasedArtifactRootDescriptor.java:87)
at org.jetbrains.jps.incremental.artifacts.IncArtifactBuilder.build(IncArtifactBuilder.java:160)
at org.jetbrains.jps.incremental.artifacts.IncArtifactBuilder.build(IncArtifactBuilder.java:50)
at org.jetbrains.jps.incremental.IncProjectBuilder.buildTarget(IncProjectBuilder.java:1037)
at org.jetbrains.jps.incremental.IncProjectBuilder.runBuildersForChunk(IncProjectBuilder.java:1018)
at org.jetbrains.jps.incremental.IncProjectBuilder.buildTargetsChunk(IncProjectBuilder.java:1074)
at org.jetbrains.jps.incremental.IncProjectBuilder.buildChunkIfAffected(IncProjectBuilder.java:968)
at org.jetbrains.jps.incremental.IncProjectBuilder.buildChunks(IncProjectBuilder.java:797)
at org.jetbrains.jps.incremental.IncProjectBuilder.runBuild(IncProjectBuilder.java:375)
at org.jetbrains.jps.incremental.IncProjectBuilder.build(IncProjectBuilder.java:178)
at org.jetbrains.jps.cmdline.BuildRunner.runBuild(BuildRunner.java:138)
at org.jetbrains.jps.cmdline.BuildSession.runBuild(BuildSession.java:302)
at org.jetbrains.jps.cmdline.BuildSession.run(BuildSession.java:135)
at org.jetbrains.jps.cmdline.BuildMain$MyMessageHandler.lambda$channelRead0$0(BuildMain.java:229)
at org.jetbrains.jps.service.impl.SharedThreadPoolImpl.lambda$executeOnPooledThread$0(SharedThreadPoolImpl.java:42)
at java.util.concurrent.Executors$RunnableAdapter.call(Executors.java:511)
at java.util.concurrent.FutureTask.run(FutureTask.java:266)
at java.util.concurrent.ThreadPoolExecutor.runWorker(ThreadPoolExecutor.java:1149)
at java.util.concurrent.ThreadPoolExecutor$Worker.run(ThreadPoolExecutor.java:624)
at java.lang.Thread.run(Thread.java:748)
Please perform full project rebuild (Build | Rebuild Project)